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![Schematics of micro pumps: (a) micro gear pump (according to [33]); (b)... | Download Scientific Diagram](https://www.researchgate.net/publication/286330640/figure/fig6/AS:650844227776540@1532184764875/Schematics-of-micro-pumps-a-micro-gear-pump-according-to-33-b-spiral-channel.png "Schematics of micro pumps: (a) micro gear pump (according to [33]); (b)... | Download Scientific Diagram")
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